Case Number: App_475405/2023 Patent number: EP4045978 - ETCHING COMPOSITION AND METHOD FOR EUV MASK PROTECTIVE STRUCTUREProceeding type: ApplicationAction/Application: Inanspruchnahme der AusnahmeregelungApplicants: Clarivate Represented by Iva MatkovicCourt Division: appealInstance - seat - LuxembourgDate of Formal receipt: 2023-06-02 20:00:58