Case Number: App_459687/2023 Patent number: EP2035596 - PLASMA IMMERSION ION PROCESSING FOR COATING OF HOLLOW SUBSTRATESProceeding type: ApplicationAction/Application: Inanspruchnahme der AusnahmeregelungApplicants: Richly & Ritschel Patentanwälte Part mbB Represented by Erik RichlyCourt Division: appealInstance - seat - LuxembourgDate of Formal receipt: 2023-06-01 09:08:39