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Case details

Case Number: App_475407/2023

  • Patent number:
    EP4069794 - HIGH OXIDE FILM REMOVAL RATE SHALLOW TRENCH ISOLATION (STI) CHEMICAL MECHANICAL PLANARIZATION (CMP) POLISHING

  • Proceeding type: Application

  • Action/Application: Dérogation

  • Applicants:
    Clarivate Represented by Iva Matkovic

  • Court Division: appealInstance - seat - Luxembourg

  • Date of Formal receipt: 2023-06-02 20:01:08