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Case details

Case Number: App_475376/2023

  • Patent number:
    EP3689988 - SHALLOW TRENCH ISOLATION (STI) CHEMICAL MECHANICAL PLANARIZATION (CMP) POLISHING WITH TUNABLE SILICON OXIDE AND SILICON NITRIDE REMOVAL RATES

  • Proceeding type: Application

  • Action/Application: Opt-out

  • Applicants:
    Clarivate Represented by Iva Matkovic

  • Court Division: appealInstance - seat - Luxembourg

  • Date of Formal receipt: 2023-06-02 19:59:06